MountainsMap® SEM

Dedicated image enhancement, 3D reconstruction and metrology software
for scanning electron microscopes (SEM)

 30-day Free Trial

Product Information Sheet
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Why choose MountainsMap® SEM software?

  • SEM image enhancement and colorization - including denoising filters and tools for removing anomalies.
  • Contour extraction and dimensioning - extract contours from SEM images and add dimensions.
  • 3D reconstruction of surface topography - from anaglyphs, two successive tilted scans of a sample, or a single four image scan.
  • Visualization of reconstructed 3D surfaces - view them at any angle and zoom level.
  • SEM surface analysis and metrology - analyze the geometry, form, roughness and texture of reconstructed surfaces.
  • Advanced imaging and analysis modules - analyze surface morphology, grains and particle sizes - carry out correlative studies combining SEM images with images and 3D topography from other microscopes - and more.
  • Easy publication - create reports easily in a comfortable desktop publishing environment, export images and numerical results.

3D reconstruction from SEM quads. (Images courtesy of Agilent Technologies)

Key Features

3D reconstruction and high quality 3D imaging

 Reconstruct 3D surfaces (X, Y and Z in length units) both from stereo image pairs and anaglyphs obtained at different tilt angles and from quads obtained using multi-channel plate detectors
 High quality imaging of 3D surface topography with color-coded Z axis at any zoom level and angle, including surface flyovers (with movie output)
 Overlay SEM gray-level image on 3D colored topography and select transparency level
 Convert single images into pseudo-3D intensity maps
 Use powerful filters to enhance images, carry out smoothing, remove anomalies, etc.
 Extract 2D cross sections from 3D surfaces.

Basic surface texture analysis

 Analysis of surface roughness and waviness
 Basic functional studies including bearing ratio curve, depth distribution histogram, material/void ratio and thickness of up to three vertical slices, surface subtraction and more
 Basic ISO 25178 3D surface texture parameters (height and functional bearing ratio) and ISO 4287 2D parameters (primary and roughness)
 ASME B46.1 3D & 2D parameters and other national standards.

Geometric, dimensional and form analysis

 Extract contours from SEM images and carry out dimensional analysis
 Calculate distances, angles, areas, volumes and step heights
 Analyze lateral or topographical geometry (from extracted contour)
 Compare with nominal form (sphere, cylinder, plane or polynomial)
 Assess ISO form deviation (flatness, straightness, roundness)

Fused tungsten filament - 3D reconstruction of stereo image pair

Analyze sub-surfaces too

 Extract a sub-surface (for example contact zone, layer or valley region) using ISO 25178 segmentation by watersheds algorithms or thresholding
 Calculate parameters for the sub-surface only.

Fast, automated, traceable analysis report creation

 Smart desktop publishing user environment in 10 languages
 Hierarchical analysis workflow shows all analysis steps, ensures traceability
 Page viewer for fast navigation
 Series of measurements can be analyzed automatically using templates, Minidocs (saved sequences of analysis steps) can be applied at any time
 Comprehensive data export (Excel-compatible text files), bitmaps, PDF.

Microfossil - Contour analysis1

Correlative studies using colocalization

 Colocalize SEM images with other SEM images and images from other microscopes: for example colocalize a secondary electron image with a backscattered electron image.
 Colocalize surface topography, phase, current or other multi-channel images obtained by scanning probe microscopes with SEM images and overlay SEM images on SPM 3D surface topography (requires SPM Extension optional module).

Right. Colocalization of zone extracted from AFM surface topography with SEM backscattered electron image and overlay of SEM image on 3D topography (with transparency).2

Expandable & upgradeable

There is a wide range of optional modules for advanced and specialized applications. For example the Grains & Particles module includes multiple complementary methods for analyzing grains, particles, islands and surface morphology. The 4D Analysis module which can be used to denoise a series of SEM images using Principal Component Analysis.

Above: typical image in a series. Below: mean image denoised using principal component analysis (in the 4D Analysis module). Images courtesy of LNE (French National Metrology Institute).

Optional modules

Analyze grains, particles, islands, motifs, bumps, holes using multiple methods
 Grains & Particles module

Read SPM file formats, work with multi-channel SPM images, correct data acquisition errors
 SPM Extension module

Filter series of images, analyze 4D surface evolution
 4D Analysis module

Advanced studies, parameters & filters for areal surface analysis
 3D Advanced Surface Texture module

FFT-based texture analysis, advanced FFT filtering, multi-scale analysis by wavelets
 3D Fourier and Wavelets Analysis module

Advanced dimensioning and tolerancing, DXF CAD compare
 Advanced Contour Analysis module

Automated statistics for multiple data populations, process capability
 Statistics module

Advanced profile filtering, fractal and Fourier analysis, series of profiles
 2D Advanced Surface Texture module

Increase field of view by automatically stitching together measured surfaces that overlap on the horizontal plane
 Surface Stitching module

 1 Microfossil image courtesy of Dr. Hannes Grobe, Hannover, Germany, licensed under the Creative Commons Attribution 3.0 Unported license.
 2 AFM-SEM colocalization and overlay images courtesy of LNE (French National Metrology Institute).